| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coating device capable of applying coating liquid, in as uniform thickness as possible, to the whole area of a space in a workpiece having its top and bottom blocked.SOLUTION: Provided is a spin coating device 10 for applying coating liquid to a space K with its top and bottom blocked in a workpiece W which has an opening A communicating with the space K and is the object to be processed, said device comprising a jig 3 for fixing the workpiece W, an actuator 7 for rotating the jig 3, and a nozzle 6 for discharging the coating liquid. The nozzle 6 gets into the opening A and discharges the coating liquid to the space K. At least by reason that the workpiece W revolves, part of the coating liquid discharged to the space K having its top and bottom blocked is sprayed, so that the coating liquid is coated in the form of a film. |
