LASER PROCESSING AND DETECTING APPARATUS

摘要

Disclosed is a laser processing and inspecting apparatus. The disclosed laser processing and inspecting apparatus comprises: a first imaging optical system for observing a first surface of a substrate by a first measuring beam irradiated from the first surface of the substrate; a second imaging optical system for observing a second surface of the substrate by a second measuring beam irradiated from the second surface of the substrate; and a laser processing system performing a laser process by irradiating a processing beam to the first surface of the substrate.