| 摘要 |
The present invention relates to a power generating element using micro piezoelectric resonators and a method for manufacturing pads for the same. The power generating element using micro piezoelectric resonators comprises: a lower pad having a lower electrode on which conductive metal is deposited on one surface of a substrate having a through hole therein; a plurality of micro piezoelectric resonators vertically provided on the lower electrode of the lower pad; and an upper pad having an upper electrode on which conductive metal is deposited on one surface of another substrate having a through hole therein, wherein the upper electrode is in contact with the micro piezoelectric resonators and disposed in parallel to the lower pad so as to face the lower electrode thereof. According to the power generating element using micro piezoelectric resonators and the method for manufacturing pads for the same as described above, a pad design technique capable of connecting micro piezoelectric resonators can be realized, thereby efficiently collecting power generated in the micro piezoelectric resonators by external vibration. In addition, the conducting through holes can be formed beforehand, before forming the electrodes connected to the micro piezoelectric resonators on the upper and lower pads of the power generating element, respectively, to allow electric energy generated between the micro piezoelectric resonators and the electrodes to move outside the pads through the through holes, thereby collecting power more easily without the need of a separate connecting pad. |
