CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device which, in a relatively simple configuration, corrects off-axis chromatic aberration and deflection coma aberration at the same time.SOLUTION: The present invention is a charged particle beam device provided with a tilting purpose deflector 08 disposed between a charged particle source 01 and an objective lens 09 and used to tilt a charged particle beam, the charged particle beam device having a first optical element 07 including an electromagnetic quadrupole which generates dispersion to suppress the dispersion caused by deflection by the tilting purpose deflector 08 and provided with a second optical element comprising the deflector 06 for deflecting the charged particle beam incident upon the first optical element 07 or an electromagnetic quadrupole which causes dispersion different from the dispersion generated by the first optical element to occur in the charged particle beam.