VIBRATION PIECE, MANUFACTURING METHOD OF VIBRATION PIECE, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC EQUIPMENT AND MOBILE BODY

摘要

PROBLEM TO BE SOLVED: To provide a vibration piece capable of preventing a temperature drift caused by the difference in size and mass of weight layers of drive vibration arms extended in mutually opposite directions.SOLUTION: A gyro element 2 as a vibration piece includes: a pair of first and second drive vibration arms 441 and 442 extended in mutually opposite directions from a base part 41; first weight parts 12a and 12b provided in a first region of at least one of the drive vibration arms, with an interval from the tip of at least one of the first and the second drive vibration arms to the base part side; and second weight parts 11a and 11b provided in a second region which is a region between the tip of the first weight part and the tip of at least one of the drive vibration arms. When the area of the first region is defined as A1, the mass of the first weight part is defined as B1, the area of the second region is defined as A2 and the mass of the second weight part is defined as B2, B1/A1>B2/A2 is satisfied.