| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensing element capable of reducing the loss coefficient of a whole sensing element, and improving the detecting accuracy of acceleration or angular velocity, and shortening detection delay as much as possible.SOLUTION: A sensing element 10 includes: a piezoelectric body 12; a diaphragm 14 disposed so as to be faced to one main surface of the piezoelectric body 12; a weight section 18 disposed so as to be faced to one main surface of the diaphragm 14; an upper electrode 20 and a lower electrode 22 disposed so as to be brought into contact with the piezoelectric body 12; and a joint layer 24b disposed between at least the diaphragm 14 and the weight section 18. The loss coefficients of the joint layer 24b and the diaphragm 14 are set so as to be equal to or less than the loss coefficient of the piezoelectric body 12. |
