| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device, when used as a sensing element of an acceleration sensor or an angular velocity sensor for example, capable of improving detection accuracy of acceleration or angular velocity, and improving reliability during use.SOLUTION: A piezoelectric device 10 comprises one piezoelectric material 14 having an annular groove 12, and has an element body 22 having a support part 16 located outside thereof, a weight part 18 located inside thereof, and a flexible part 20 located between the support part 16 and the weight part 18 as one body, and a diaphragm 24 formed on the under surface of the flexible part 20 of the element body 22. |
