| 摘要 |
PROBLEM TO BE SOLVED: To quickly start CVD processing.SOLUTION: A gas window 161 retreats outward from a lower part of a laser radiation monitoring unit 162 and moves upward, after stopping supply of raw material gas and the like. A shutter section 165A of a gas shutter 165 is inserted below the gas window 161, and supply of the raw material gas and the like from the gas window 161 is restarted. An interval between the gas window 161 and the shutter section 165A is set almost identical to an interval between the gas window 161 and a workpiece during CVD processing. The present invention can be applied, for example, to a laser repair device. |
