PRESSURE CONTROLLER, AND POLISHING DEVICE EQUIPPED WITH THE PRESSURE CONTROLLER

摘要

PROBLEM TO BE SOLVED: To provide a pressure controller capable of eliminating an error of a pressure measurement value caused by temperature drift of a pressure sensor or the like and accurately regulating a pressure of a fluid.SOLUTION: A pressure controller includes: a pressure regulating valve 6 for regulating a pressure of a fluid supplied from a fluid supply source; a first pressure sensor 7 for measuring the pressure regulated by the pressure regulating valve 6; a second pressure sensor P1 disposed on the downstream side of the first pressure sensor 7; a PID control part 5 for generating a correction pressure command value for eliminating the difference between a pressure command value and a pressure value of the fluid measured by the second pressure sensor P1; and a regulator control part 8 for controlling the operation of the pressure regulating valve 6 so that the difference between the correction pressure command value and a pressure value measured by the first pressure sensor 7.