发明名称 |
METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of enhancing productivity without causing cost increase, by forming an electrode pattern by means other than etching.SOLUTION: The method of manufacturing a piezoelectric element device includes a step for forming an electrode pattern 15 by punching the electrode pattern 15 through a conductive layer for electrode 12 of a laminate 13 having the conductive layer for electrode 12 formed on a plastic film 10, and then removing the part of the conductive layer for electrode 12 other than the electrode pattern 15, and a step for sticking a laminate 17 in which the electrode pattern 15 is formed and a long piezoelectric film. |
申请公布号 |
JP2014022583(A) |
申请公布日期 |
2014.02.03 |
申请号 |
JP20120160233 |
申请日期 |
2012.07.19 |
申请人 |
SUMITOMO ELECTRIC IND LTD;KANSAI UNIV |
发明人 |
KAIMORI SHINGO;SUGAWARA JUN;TANUKI YOSHIRO |
分类号 |
H01L41/22;H01L41/08;H01L41/09;H01L41/193 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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