发明名称 METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method capable of enhancing productivity without causing cost increase, by forming an electrode pattern by means other than etching.SOLUTION: The method of manufacturing a piezoelectric element device includes a step for forming an electrode pattern 15 by punching the electrode pattern 15 through a conductive layer for electrode 12 of a laminate 13 having the conductive layer for electrode 12 formed on a plastic film 10, and then removing the part of the conductive layer for electrode 12 other than the electrode pattern 15, and a step for sticking a laminate 17 in which the electrode pattern 15 is formed and a long piezoelectric film.
申请公布号 JP2014022583(A) 申请公布日期 2014.02.03
申请号 JP20120160233 申请日期 2012.07.19
申请人 SUMITOMO ELECTRIC IND LTD;KANSAI UNIV 发明人 KAIMORI SHINGO;SUGAWARA JUN;TANUKI YOSHIRO
分类号 H01L41/22;H01L41/08;H01L41/09;H01L41/193 主分类号 H01L41/22
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