| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance device with high conveyance efficiency of a substrate.SOLUTION: A substrate conveyance device 1 includes a first hand mechanism 40 and a second hand mechanism 140. The first hand mechanism 40 includes a first lower arm 41, a first upper arm 42, a first hand 43 of which end portion is a first substrate-holding section 43a, a first following mechanism 44 that rotates the first hand 43 according to the rotation of the first upper arm 42. The first substrate-holding section 43a is configured to be movable between a contraction position and an extension position by the rotations of the first lower arm 41, the first upper arm 42, and the first hand 43. The second hand mechanism 140 includes a second lower arm 141, a second upper arm 142, a second hand 143 of which end portion is a second substrate-holding section 143a, a second following mechanism 144 that rotates the second hand 143 according to the rotation of the second upper arm 142. The second substrate-holding section 143a is configured to be movable synchronously with the first substrate-holding section 43a between a contraction position and an extension position by the rotations of the second lower arm 141, the second upper arm 142, and the second hand 143. |
