| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid transfer system having such a pinch valve that the occurrence of a particle is suppressed.SOLUTION: A fluid transfer system transfers a fluid in a semiconductor manufacturing device, and includes: fluid supply means 1; a fluid transfer pipe 2 made of a fluororesin that transfers the fluid supplied from the fluid supply means 1 and in which the metal elution amount of the inner surface is 10 ng/cm2 per day or less; and a pinch valve 3 arranged at one or more places of the fluid transfer pipe 2. The pinch valve 3 includes a pipe body whose liquid contact surface is made of a fluorine elastomer so that when the pinch valve 3 is changed from a full close state to a full open state after the pinch valve 3 is left in the full close state for 24 hours, an occurrence amount of a particle having a particle size of 0.05 μm or more is 20 or less. |
