发明名称 VIBRATION ACTUATOR UNIT, STAGE DEVICE AND OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vibration actuator unit which can drive a driven object in a different moving direction.SOLUTION: The vibration actuator unit includes an electromechanical conversion element for converting an electrical vibration of a driving voltage applied into a mechanical vibration, and a contact portion which comes into contact with the driven surface of a driven object and transmits the mechanical vibration of the electromechanical conversion element as a driving force to the driven surface. The electromechanical conversion element vibrates the contact portion in a first vibration surface by bending periodically in the first vibration surface intersecting the driven surface, and vibrates the contact portion in a second vibration surface by bending periodically in the second vibration surface intersecting the first vibration surface.
申请公布号 JP2014023360(A) 申请公布日期 2014.02.03
申请号 JP20120161999 申请日期 2012.07.20
申请人 NIKON CORP 发明人 KUSANO MASAAKI;MATSUKAWA EIJI
分类号 H02N2/00 主分类号 H02N2/00
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