| 摘要 |
PROBLEM TO BE SOLVED: To suppress thermal stress generated in a ceramic heater.SOLUTION: A ceramic heater 1 includes: a heating element 5; a ceramic structure 2 in which the heating element 5 is buried; a graphene sheet laminate 3 covering the surface of the ceramic structure 2; and a metal case 4 covering the graphene sheet laminate 3. By arranging the graphene sheet laminate 3, the deviation of a thermal distribution is reduced, so that generation of thermal stress can be suppressed. |
