METHOD OF PRODUCING DIELECTRIC FILM, METHOD OF PRODUCING THIN-FILM SECONDARY BATTERY AND DIELECTRIC FILM FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a dielectric film, a method of producing thin-film secondary battery and a dielectric film forming apparatus that may suppress dendrite-like precipitation.SOLUTION: A step for depositing a thin film consisting of a dielectric material on an electrode formed on a substrate comprises: a step for superposing an electric conductive mask 15 on the substrate so that a part of the electrode is exposed; and a step for exposing the exposed part to a plasma containing the dielectric material, and at least a part superposed to the electrode of a counter surface BS of the mask 15 facing the electrode has insulation properties.