| 摘要 |
PROBLEM TO BE SOLVED: To charge temperature-controlling fluid into a piping section of a temperature control system simply and without fail.SOLUTION: A temperature control system 1 is equipped with: a low-temperature flow path 76 provided with a variable valve 79a which controls flow rate of low-temperature fluid; a high-temperature flow path 77 provided with a variable valve 79c which controls flow rate of high-temperature fluid; a combining flow path 71 which allows the low-temperature fluid and the high-temperature fluid to merge and supplies the fluid to a temperature-controlling section 70; a collecting flow path 72 which collects the fluid supplied to the temperature-controlling section 70; a bypass flow path 73 which is provided with a variable valve 79b and in which a part of fluid flowing in the collecting flow path 72 is allowed to circulate to the temperature-controlling section 70; and a circulation pump 87 provided for the collecting flow path 72. The variable valves 79a, 79b are opened at a predetermined valve opening degree to the temperature control system 1 to supply the low-temperature fluid for a predetermined time (S101), the variable valves 79b, 79c are opened at a predetermined valve opening degree to supply the high-temperature fluid for a predetermined time (S103), and a circulation pump 87 is activated in the state where the fluid is charged into the circulation pump 87 (S106). |
