发明名称 |
METHOD OF MANUFACTURING POLYSILICON USING APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR |
摘要 |
PURPOSE: A poly-silicon manufacturing device and method of electronic beam melting base are provided to maximize elimination efficiency of metallic impurities by applying a dummy bar when unidirectionally coagulating molten silicon. CONSTITUTION: The inside of a vacuum chamber(110) is maintained under high-vacuum atmosphere. A first electron gun(120a) and a second electron gun(120b) radiate electron beam in the inner side of the vacuum chamber. A silicon melting unit(130) is arranged is arranged in a first electron beam radiation area. A one-way solidification unit(140) is arranged in a second first electron beam radiation area. The one-way solidification unit comprises a start block(145) transferring molten silicon to a down direction. |
申请公布号 |
KR101356442(B1) |
申请公布日期 |
2014.02.03 |
申请号 |
KR20100120059 |
申请日期 |
2010.11.29 |
申请人 |
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发明人 |
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分类号 |
C30B11/00;C30B29/06;H01L21/02 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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