| 摘要 |
The present invention relates to a substrate transfer conveyor, and more specifically, to a substrate transfer conveyor capable of easily settling and grabbing a substrate, cleaning the settled substrate by spraying water from an upper portion and a lower portion, and preventing the substrate from being damaged during transfer. The substrate transfer conveyor of the present invention comprises: a frame part (1100) having both lateral side frames (1110, 1120) and a fixed leg block (1130) for installing the both lateral side frames to stand upright while having a specific distance therebetween; a driving unit (1200) installed while being connected to any one lateral side among the frames to supply driving power; a rotating power transferring part (1300) including a belt gear, an idle gear, and an idle roller and being installed at the frames to transfer rotating power of the driving part; magnet members (1400) each installed at both ends of inner lateral sides of the frames; one pair of transferring belts (1500) installed to have a specific distance therebetween and rotating in a specific orbit at the inner lateral sides of the frames; and substrate transferring units (1600) fixed on an outer surface of the transferring belts at constant intervals and each having a substrate holder which moves toward the magnet members to grab and transfer a substrate (T) if the substrate transferring units gets close to the magnet members, and which moves apart from the magnet members to release the substrate if the substrate transferring units gets apart from the magnet members. |
