发明名称 SENSING DEVICE, INSPECTION DEVICE, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To improve the ability to shield a light-receiving unit and circuit unit from the light to restrain an increase in optical leakage current in transistors placed in the light-receiving unit and circuit unit, thereby improving sensing accuracy.SOLUTION: A sensing device of the present invention comprises: a sensor board having a light-receiving unit including a photoelectric conversion element and a circuit unit to drive the light-receiving unit; a shielding film formed on top of the light-receiving unit and circuit unit in a plan view and having an opening corresponding to the photoelectric element; and a specific wavelength cut filter formed on top of the light-receiving unit and circuit unit in a plan view. The shielding film and the specific wavelength cut filter help to restrain unnecessary light which causes leakage current in transistors to increase. Furthermore, even when a shielding ability degraded region develops in the shielding film, shielding ability is secured by the specific wavelength cut filter and an increase in transistor leakage current which causes sensing accuracy to decline is restrained.
申请公布号 JP2014022675(A) 申请公布日期 2014.02.03
申请号 JP20120162379 申请日期 2012.07.23
申请人 SEIKO EPSON CORP 发明人 TOTANI TAKASHI;KUBOTA TAKEHIKO
分类号 H01L27/14;H04N5/369 主分类号 H01L27/14
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