| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that it is required to reduce an eddy current induced in a magnetic pole, because an eddy current resulting from the time variation of a magnetic field is induced in a vacuum duct or a magnetic pole, and thereby the position of a beam irradiated is changed, and that the eddy current thus induced increases, especially, in the end magnetic pole, because the magnetic field is generated in a direction perpendicular to a laminated steel plate.SOLUTION: A deflection electromagnet 100 includes a pair of magnetic poles 110 disposed to face each other so that a gap 120 for passing an ion beam is provided, a pair of yokes 130 bonded to the magnetic poles 110 and defining a magnetic path, and a coil 140 wound around the magnetic poles 110. The magnetic pole 110 has a layer shape formed by laminating electrical steel sheets, and bonding the surface of the magnetic poles 110 facing the gap 120 and the surface of the magnetic poles 110 facing outside thereof in the orbital direction of the ion beam. |
