| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid control device, in which a mesh body is stuck fast uniformly to a surface of a liquid to be supplied and workability can be improved when the mesh body is attached to a main body and detached from the main body.SOLUTION: A liquid vaporizer 10 includes: a first housing 11 having a surface 11a of a chemical liquid to be supplied; a heater 70; a mesh 31; a first holder 34A and a second holder 34B attached respectively at outside edge parts of the mesh 31, which are opposed to each other in a spreading direction of the mesh 31; cover bolts 35A; a stem 38 supported by the first housing 11 to be moved along a predetermined direction tilting toward the surface 11a; cover bolts 35B; a coil spring for pressing the stem 38 along the predetermined direction to stick the mesh 31 fast to the surface 11a; and a lid member 80 for covering the mesh 31 from the side of the surface 11a to hermetically seal a space around the surface 11a together with the first housing 11. |
