发明名称 VIBRATION PIECE, FREQUENCY ADJUSTMENT METHOD FOR THE SAME, VIBRATOR, OSCILLATOR AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a vibration piece that can suppress occurrence of burrs when parts of weight portions for frequency adjustment are removed by a laser beam even if an adjustment width of a frequency is increased, and further to provide a frequency adjustment method therefor, and a vibrator, an oscillator, and an electronic apparatus that are provided with the vibration piece and are excellent in reliability.SOLUTION: A vibration piece 2 includes a vibration arm 5 extending from a base portion and a weight portion 12 for frequency adjustment provided on the vibration arm 5. The weight portion 12 is configured so as to include a first layer 121, a second layer 122 provided at a vibration arm 5 side with respect to the first layer 121, and a third layer 123 provided at the vibration arm 5 side with respect to the second layer 122. A constituent material of the second layer 122 has a melting point higher than those of constituent materials of the first layer 121 and the third layer 123.
申请公布号 JP2014022862(A) 申请公布日期 2014.02.03
申请号 JP20120158355 申请日期 2012.07.17
申请人 SEIKO EPSON CORP 发明人 MIKAMI MASARU
分类号 H03H9/02;H01L41/09;H01L41/18;H03H3/04;H03H9/10;H03H9/19;H03H9/215 主分类号 H03H9/02
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