| 摘要 |
PROBLEM TO BE SOLVED: To provide a flatness measuring device and a flatness measuring method which allow for measuring flatness of a surface under measurement without being affected by errors associated with movement accuracy of optical means such as a laser displacement meter.SOLUTION: A measurement light beam is irradiated on a vertically placed glass substrate and on a vertically or approximately vertically placed object under measurement through the glass substrate, and a reflected measurement light beam from the object under measurement and a reflected light beam from the glass substrate are measured. The measurement light beam is irradiated on a plurality of spots on the object under measurement and a plurality of reflected measurement light beams and reflected light beams from the glass substrate are acquired to measure flatness of the object under measurement using the plurality of reflected measurement light beams, the plurality of reflected light beams from the glass substrate, and flatness of the glass substrate surface. |
