| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the deposition of a negative ion to a target by neutralizing the negative polarity of the target.SOLUTION: The ion generator comprises: a positive ion generator 13; a negative ion generator 14; and a controller for controlling the activation and stop of the ion generators. The positive ion generator 13 generates positive ions in action. The negative ion generator 14 generates negative ions and electrons for turning a positive ion into a neutral atom in action. The controller selectively executes first and second modes. In the first mode, positive ions are discharged to the outside by activating the positive ion generator 13, and stopping the negative ion generator 14. In the second mode, neutral atoms and negative ions are discharged to the outside by activating both of the positive ion generator 13 and the negative ion generator 14. |
