| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary actuator capable of detecting both a rotation direction and rotation angle of a movable electrode, and prevent a thickness thereof from increasing and detection accuracy of the rotation angle from lowering.SOLUTION: In a rotary actuator, a holding member 130 attaches a movable electrode 120 to a frame body 110 and serves as an axle of the movable electrode 120. Fixed electrodes 140 each are opposite to the movable electrode 120 in plan view. A detection electrode 150 is insulated from the movable electrode 120 and the fixed electrodes 140, and is opposite to one side of the movable electrode 120 in plan view. The center of the holding member 130 in its thickness direction does not overlap with the center of the movable electrode 120 in its thickness direction. |
