发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To prevent chip breaking in a semiconductor device manufacturing process to improve reliability of the semiconductor device.SOLUTION: A semiconductor device comprises: a sacrificial region 100 provided on an outer peripheral region of a seal ring 200 bent in an L-shape in a chip corner region; a plurality of L-shaped aluminum distributions 124A arranged in top layer wiring 104 in the sacrificial region so as to open an internal circuit region 300; and a plurality of L-shaped metal distributions 40 arranged in a middle layer in the sacrificial region similarly to the top layer wiring.
申请公布号 JP2014022611(A) 申请公布日期 2014.02.03
申请号 JP20120160895 申请日期 2012.07.19
申请人 RENESAS ELECTRONICS CORP 发明人 SHIMADA HIROTOSHI
分类号 H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/3205
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