发明名称 REPAIRING ANOMALOUS STIFF PILLAR BUMPS
摘要 Generally, the subject matter disclosed herein relates to repairing anomalous stiff pillar bumps that may be detected above a metallization system of a semiconductor chip or wafer. One illustrative method disclosed herein includes, among other things, forming a pillar bump above a metallization system of a semiconductor chip, and forming a plurality of notches in the pillar bump, wherein the plurality of notches are adapted to adjust a flexibility of the pillar bump when the pillar bump is exposed to a lateral force.
申请公布号 US2014027902(A1) 申请公布日期 2014.01.30
申请号 US201213560280 申请日期 2012.07.27
申请人 RYAN VIVIAN W.;GEISLER HOLM;BREUER DIRK;GLOBALFOUNDRIES INC. 发明人 RYAN VIVIAN W.;GEISLER HOLM;BREUER DIRK
分类号 H01L21/768;H01L21/66;H01L23/498 主分类号 H01L21/768
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