| 摘要 |
<p>[Problem] To prevent a shutter from coming into contact with a substrate. [Solution] A first electrode beam (32) comprises: a central section (36) which extends in line with a second electrode beam (38); a first portion (42) which extends, via a first bent section (44) that is adjacent to one end of the central section (36), in a direction that intersects with the direction in which the central section (36) extends; and a second portion (46) which extends, via a second bent section (48) that is adjacent to the other end of the central section (36), in a direction that intersects with the direction in which the central section (36) extends. The first electrode beam (32) has a flat spring section (58), which extends across the entire length thereof, and the thickness of which is thinner than the width thereof. The flat spring section (58) is arranged such that the thickness thereof is toward the direction facing a substrate and the width thereof is toward the direction intersecting the substrate, so as to be easier to bend in the direction parallel to the substrate rather than perpendicular to the substrate. The first electrode beam (32) has, in the first portion (42) and/or the second portion (46), avoiding the central section (36), a rib section (60) provided in the thickness direction in the flat spring section (58).</p> |
