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发明名称
THE USE OF ELECTRON BEAMS FOR EXAMINING SURFACE STRUCTURE
摘要
申请公布号
GB1293716(A)
申请公布日期
1972.10.25
申请号
GB19710022775
申请日期
1971.04.19
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
分类号
H01J37/244;H01J37/256;H01J37/28
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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