| 发明名称 |
TARGET MATERIAL AND METHOD FOR PRODUCING SAME |
| 摘要 |
The present invention provides a target material having a composition formula by atomic ratio of (Fex-CO100-x)100-Y-MY (where M is at least one element selected from Ta and Nb and X and Y satisfy 0 <= X <= 80 and 10 <= Y <= 30, respectively), wherein the balance is formed from inevitable impurities and the distortion factor of rupture in bending at 300°C is 0.33% or greater. |
| 申请公布号 |
WO2014017381(A1) |
申请公布日期 |
2014.01.30 |
| 申请号 |
WO2013JP69565 |
申请日期 |
2013.07.18 |
| 申请人 |
HITACHI METALS,LTD. |
发明人 |
SAKAMAKI, KOUICHI;FUKUOKA, JUN;HATA, TOMOYUKI;SAITO, KAZUYA |
| 分类号 |
C23C14/34;B22F3/00;B22F3/14;B22F3/15;C22C1/04;C22C19/07;C22C33/02;C22C38/00;G11B5/851 |
主分类号 |
C23C14/34 |
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