发明名称 CHAMBERS WITH IMPROVED COOLING DEVICES
摘要 Embodiments of the present invention provide a heating assembly using a heat exchange device to cool a plurality of heating element. The heating assembly includes a plurality of heating elements, a cooling element having one or more cooling channels for receiving cooling fluid therein, and a heat exchange device disposed between the plurality of heating elements and the cooling element. The heat exchange device comprises a hot interface disposed adjacent to and in thermal contact with the plurality of heating elements and a cold interface disposed adjacent to and in thermal contact with the cooling element.
申请公布号 US2014027092(A1) 申请公布日期 2014.01.30
申请号 US201313787960 申请日期 2013.03.07
申请人 APPLIED MATERIALS, INC. 发明人 RANISH JOSEPH M.;HUNTER AARON MUIR
分类号 F25B29/00 主分类号 F25B29/00
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