| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type physical quantity sensor of which the reduction in detection accuracy of a physical quantity is suppressed by attitudinal control.SOLUTION: The capacitance type physical quantity sensor includes an anchor (30), a detection beam (20) connected to a substrate via the anchor, a weight part (17) connected to the detection beam, a movable electrode (18) formed on the weight part, and a fixed electrode (19) facing the movable electrode. A first movable detection electrode and a first fixed detection electrode face each other in a first y direction, and a second movable detection electrode and a second fixed detection electrode face each other in a second y direction, and a first movable damping electrode is located at the center between two first fixed damping electrodes and faces one first fixed damping electrode in the first y direction and faces the other first fixed damping electrode in the second y direction, and a plurality of first movable damping electrodes are located point-symmetrically with respect to a center (CP) of the weight part or line-symmetrically with respect to a center line (CL) passing the center and being in the y direction. |
