| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor having corrosion resistance.SOLUTION: A flow sensor includes: a flow channel body 3 in which a flow channel 1 channeling fluid such as gas or liquid therethrough and an insertion hole 2 communicating with the flow channel 1 from the outer surface are provided; a glass-made pedestal 11 inserted into the insertion hole 2 of the flow channel body 3; an elastic gasket 5 arranged between the insertion hole 2 and the pedestal 11; and a chip 20 arranged on the upper surface of the pedestal 11. The chip 20 includes: a glass-made substrate; a flow speed detection part including an electric resistance element which is arranged on the upper surface of the substrate and is positioned inside the flow channel 1; and an electrode which penetrates through the substrate and is electrically connected to the electric resistance element. |
