发明名称 |
SEMICONDUCTOR STRUCTURE FOR ANTENNA SWITCHING CIRCUIT AND MANUFACTURING METHOD THEREOF |
摘要 |
A manufacturing method for antenna switching circuit includes the following steps of: providing a GaAs wafer, which includes a capping layer; disposing an isolation layer to the GaAs wafer for forming a device area; and disposing a gate metal on the capping layer within the device area, wherein an interface between the gate metal and the capping layer forms a Schottky contact, and the Schottky contact is parallel connected with an impedance. The present invention also discloses a semiconductor structure for antenna switching circuit. |
申请公布号 |
US2014027877(A1) |
申请公布日期 |
2014.01.30 |
申请号 |
US201313886778 |
申请日期 |
2013.05.03 |
申请人 |
MAXTEK TECHNOLOGY CO., LTD. |
发明人 |
LIAO KE-KUNG;CHANG TUNG-SHENG;KU CHUN-YEN;CHEN SHIH-YU |
分类号 |
H01L29/872;H01L29/66 |
主分类号 |
H01L29/872 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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