| 摘要 |
The aim of the invention is to increase the power of excimer lasers and decrease outlay in producing generation energy. This result is achieved in that rigidly connected end flanges (25) of a laser chamber (1) are hermetically sealed to the outer surface (29) of a ceramic pipe (24) of said chamber, which pipe can be composed of either two or three hermetically interconnected ceramic modules (24a, 24b, 24c). In variants of the invention, the inner wall of the laser chamber ceramic pipe has an extended recess (39), in which a first electrode (2) and a preionization unit (5) are mounted, and the outer wall of the ceramic pipe (24) is provided with cells (44) in which capacitors (14), distributed along the length of the laser, are partially submerged. In one variant of the laser, extended containers (50) are installed near a second electrode (3), said containers containing additional capacitors (53) which are charged via the ends of said containers (50) by an additional power source (54) that is polarly opposite to a power source (20). The laser system comprises an identical first laser (59) and second laser (60) and an optical communication system (68) therebetween. |
