SUBSTRATE CONTAMINATION RECOVERY METHOD, SUBSTRATE CONTAMINATION RECOVERY APPARATUS, AND SUBSTRATE CONTAMINATION RECOVERY ANALYSIS SYSTEM

摘要

PROBLEM TO BE SOLVED: To unfailingly recover only a contamination metal adhering to a peripheral part of a substrate and accurately analyze the contamination metal adhering to the peripheral part of the substrate.SOLUTION: A liquid is supplied only to a peripheral part of a substrate W1. Droplets contact with the peripheral part of the substrate W1. This process causes a contamination metal adhering to the peripheral part of the substrate W1 to be taken in the droplets. Then, the droplets contacting with the peripheral part of the substrate W1 are cooled to be freezed. This process changes the droplets contacting with the peripheral part of the substrate W1 to an ice block. The ice block taking in the metal contamination is peeled from the substrate W1 to be analyzed by an analyzer.