发明名称 |
TUBULAR TARGET HAVING A PROTECTIVE DEVICE |
摘要 |
A tubular target for cathode atomization does not have a backing tube and it is made of molybdenum or a molybdenum alloy. The target has an inner surface which is in contact at least in certain regions with a cooling medium, wherein at least one region of the inner surface is separated from the cooling medium by at least one protective device. By way of example, the protective device may be in the form of a polymer layer. The tubular target exhibits outstanding long-term stability. |
申请公布号 |
US2014027276(A1) |
申请公布日期 |
2014.01.30 |
申请号 |
US201214110527 |
申请日期 |
2012.04.05 |
申请人 |
LINKE CHRISTIAN;SULIK MANFRED;KATHREIN MARTIN;PLANSEE SE |
发明人 |
LINKE CHRISTIAN;SULIK MANFRED;KATHREIN MARTIN |
分类号 |
C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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