摘要 |
PROBLEM TO BE SOLVED: To provide a system and method which, even if some noise is included in a template image a search-target image, causes subpixel estimation processing to function effectively, thereby accurately measuring the position of a search target.SOLUTION: Before execution of the subpixel estimation processing, the data value of a pixel included in a first image data area is compared with the data value of a pixel included in a second image data area existing at a position relatively equal to the position of the pixel in the first image data area. Then, if it is determined that the combination is not suitable, the data values are replaced so that the combination becomes suitable, and thereafter the subpixel estimation processing is executed. |