发明名称 SUBSTRATE HOUSING CONTAINER
摘要 PROBLEM TO BE SOLVED: To provide a substrate housing container which speeds up the work and improves the efficiency of the work when a gas in a container body is replaced.SOLUTION: A fitting hold groove 26, in which a seal gasket 40 fits, is formed, for example, at a lid 20, and a seal formation surface 16, with which the seal gasket 40 contacts, is formed at a container body 10. The seal gasket 40 comprises: a base substance 40A held in the fitting hold groove 26; an extension piece 41 which protrudes from the base substance 40A; and a first seal piece 42 and a second seal piece 43 which protrude from the extension piece 41 to the seal formation surface 16 side. The first seal piece 42 extends to the outer side of the seal gasket 40, and the second seal piece 43 extends to the inner side of the seal gasket 40.
申请公布号 JP2014017452(A) 申请公布日期 2014.01.30
申请号 JP20120155824 申请日期 2012.07.11
申请人 SHIN ETSU POLYMER CO LTD 发明人 IGARASHI WATARU;FUJIMOTO YASUHIRO
分类号 H01L21/673;B65D53/06;B65D85/86 主分类号 H01L21/673
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