发明名称 DEVICE AND METHOD FOR CHARACTERIZING A SAMPLE USING LOCALIZED MEASUREMENTS
摘要 The invention relates to a device (10) for characterizing a sample (11), comprising a measuring instrument (20) suitable for determining a physical characteristic of the sample at one point thereof. More specifically, the characterization device of the invention comprises a positioning system (30) suitable for positioning the measuring instrument in relation to the sample, in order to obtain a measurement at a measurement point localized on the sample, in an absolute manner. For this purpose, the invention provides a characterization device including a positioning system that comprises: a locating target (31) solidly connected to the sample and defining a reference system linked to the sample; means for acquiring and analysing images, comprising lighting means (321) for illuminating the locating target, an optical imaging system (322) solidly connected to the measuring instrument and suitable for acquiring an image (31P) of at least one portion of the locating target, and image analysis means (33) suitable for analysing the image of the portion of the locating target in order to determine the position and orientation of the optical imaging system in relation to the locating target; calibration means (34, 34A) for determining the relative position of the measuring instrument in relation to the optical imaging system; and processing means (13) for processing the results of the image analysis and of the calibration, suitable for determining the absolute position of the localized measurement point in the reference system linked to the sample, the measuring instrument being positioned to take the measurement at said localized measurement point and the physical characteristic of the sample being determined by the measuring instrument at the localized measurement point.
申请公布号 WO2014016526(A1) 申请公布日期 2014.01.30
申请号 WO2013FR51802 申请日期 2013.07.25
申请人 HORIBA JOBIN YVON SAS 发明人 ACHER, OLIVIER;PODZOROV, ALEXANDER
分类号 G01Q40/00;B82Y35/00;G02B21/00;G02B21/36 主分类号 G01Q40/00
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