PIEZOELECTRIC ACTUATOR AND METHOD OF MAKING A PIEZOELECTRIC ACTUATOR
摘要
In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10nm at the bonding interface with the membrane.
申请公布号
WO2014018028(A1)
申请公布日期
2014.01.30
申请号
WO2012US48058
申请日期
2012.07.25
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;ABBOTT, JAMES, ELMER, JR.;CHEN, CHIEN-HUA;POLLARD, JEFFREY, R.
发明人
ABBOTT, JAMES, ELMER, JR.;CHEN, CHIEN-HUA;POLLARD, JEFFREY, R.