发明名称 MEMS DEVICE
摘要 A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.
申请公布号 US2014026660(A1) 申请公布日期 2014.01.30
申请号 US201313936144 申请日期 2013.07.06
申请人 ZHANG BIAO;JU TAO 发明人 ZHANG BIAO;JU TAO
分类号 G01C19/56 主分类号 G01C19/56
代理机构 代理人
主权项
地址