| 发明名称 |
ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSION (CD) METROLOGY |
| 摘要 |
Approaches for accurate neural network training for library-based critical dimension (CD) metrology are described. Approaches for fast neural network training for library-based CD metrology are also described. |
| 申请公布号 |
US2014032463(A1) |
申请公布日期 |
2014.01.30 |
| 申请号 |
US201314044729 |
申请日期 |
2013.10.02 |
| 申请人 |
JIN WEN;VUONG VI;BAO JUNWEI;LEE LIE-QUAN;POSLAVSKY LEONID |
发明人 |
JIN WEN;VUONG VI;BAO JUNWEI;LEE LIE-QUAN;POSLAVSKY LEONID |
| 分类号 |
G06N3/08 |
主分类号 |
G06N3/08 |
| 代理机构 |
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