PATTERN DIMENSION CALCULATION METHOD AND IMAGE ANALYSIS DEVICE

摘要

PROBLEM TO BE SOLVED: To enable a calculation of a pattern dimension in any local position of a contour line or a specific part thereof easily, and to obtain an image data analysis capable of accurately calculating a representative dimension value of the contour line.SOLUTION: The pattern dimension calculation method according to the present invention is configured to: create coordinate data of each apex of polygon contour data to be obtained on the basis of image data imaged by a scanning electron microscope; calculate a region where contour data on an inspection target pattern and rectangle data for measuring a length are overlapped with each other; calculate a target dimension value from an area of the overlapped region; upon calculating the target dimension value, generate an auxiliary line perpendicular to a counter side crossing the rectangular overlapped region of the rectangle data for measuring the length in the overlapped region; divide the overlapped region into a plurality of trapezoidal regions by drawing a vertical line from each apex of which the coordinate data is created with respect to the auxiliary line; calculate an area of the overlapped region from a total sum of areas of each trapezoidal region; and divide the area of the overlapped region by a dimension of a side serving as the rectangle data for measuring the length and not crossing the contour data and thereby calculate the target dimension value.