发明名称 INTERFEROMETRIC DISTANCE MEASURING ARRANGEMENT AND CORRESPONDING METHOD
摘要 The invention relates to an interferometric distance measuring arrangement for measuring surfaces, using at least one laser which can be tuned for generating measurement radiation modulated by a wave length ramp, an optical beam path with an optical transmitting system for emitting the measurement radiation to the surface and an optical capturing system for capturing the measurement radiation back-scattered by the surface, comprising a measuring arm and a reference arm and a radiation detector and an evaluation unit for determining the distance from a reference point of the distance measuring device to the surface. Channels are defined by at least one beamsplitter (13, 29) n >= 2 for the parallel emission of measurement radiation, respectively, one different sub area of the wave length ramp is allocated to said channels at a predetermined emission time point.
申请公布号 WO2014016201(A1) 申请公布日期 2014.01.30
申请号 WO2013EP65224 申请日期 2013.07.18
申请人 HEXAGON TECHNOLOGY CENTER GMBH 发明人 JENSEN, THOMAS
分类号 G01B9/02 主分类号 G01B9/02
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