发明名称 MOSFET GATE AND SOURCE/DRAIN CONTACT METALLIZATION
摘要 A MOSFET is described incorporating a common metal process to make contact to the source, drain and the metal gate respectively which may be formed concurrently with the same metal or metals.
申请公布号 US2014027865(A1) 申请公布日期 2014.01.30
申请号 US201314043848 申请日期 2013.10.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SEO SOON-CHEON;DORIS BRUCE B.;YANG CHIH-CHAO
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
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