ZnO FILM PRODUCTION DEVICE, AND PRODUCTION METHOD

摘要

This ZnO film production method involves an installation step in which a substrate (2) is installed on an installation base (3), and a film formation step in which a control device (CONT) controls a heating means (heaters (H1, H2, H3)) such that the temperature (T1) of a first starting material storing part (R1), the temperature (T2) of a second starting material storing part (R2), and the temperature (T3) of the installation base (3) on which the substrate (2) is installed satisfy the relationship of T1