GAS SEPARATION

摘要

A device (1) for moving gas in vacuum coating systems is disclosed, which suctions out gaseous coating material in the coating chamber that has not precipitated onto the substrates (3) to be coated. At least one pump for suctioning out the coating material is connected in an axial extension (112) of the suction device to the same, wherein the suction device has one or more suction openings (121) and is subdivided into at least two axial areas, the suction characteristics of which can be adjusted largely separately from one another.