发明名称 METHOD OF FORMING METAL THIN FILM USING ELECTROLESS DEPOSITION AND THIN FILM DEVICE FABRICATED USING THE METHOD
摘要 Provided is a technique for electroless deposition (ELD) for forming metal conductive layer on an insulating substrate made of glass, polymer, etc. According to an aspect, an adhesive layer and a catalyst layer are formed on a substrate using a dry deposition method, such as are plasma deposition (APD) or sputtering, etc., and electroless deposition is performed thereon, thereby forming a metal thin, film. Therefore, it is possible to significantly simplify a complicated pretreatment process required for electroless depositions and increase adhesive strength of a deposited metal thin film.
申请公布号 US2014030532(A1) 申请公布日期 2014.01.30
申请号 US201213663728 申请日期 2012.10.30
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 BYUN JI YOUNG;KIM SANG HOON;HWANG JU YEON;HA HEON PHIL
分类号 H01B19/04;B05D1/36;B05D5/10;B32B15/00;C23C16/44;C23C16/48;C23C16/50;C23C16/503 主分类号 H01B19/04
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