| 摘要 |
<p>The micro mirror has a mirror element which is tiltable formed around the axis. A coil spring is provided to bias the mirror element in a basic position, and is formed of two different materials. The spiral spring comprises primary material, from which spiral spring core is formed, and secondary material from which two opposite outer sides of the spiral spring core are formed. The spring core comprises quadratic or rectangular cross section. The primary material is made from silicon and the secondary material is made from copper, silver, gold, aluminum, carbon and diamond. An independent claim is included for method for manufacturing micro mirror.</p> |
